Thermometry tool for substrate processing apparatus



FIG. 1 is a perspective view of a thermometry tool for substrate processing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged portion view taken along line 8-8 in FIG. 1 thereof;

FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2 thereof;

FIG. 10 is an enlarged portion view taken along line 10-10 in FIG. 4 thereof; and,

FIG. 11 is an enlarged portion view taken along line 11-11 in FIG. 6 thereof.

The dashed-dot-dashed lines represent the boundary lines of the claimed design.

The broken lines shown in the drawings represent portions of the thermometry tool for substrate processing apparatus that form no part of the claimed design. 

CLAIM We claim the ornamental design for a thermometry tool for substrate processing apparatus, as shown (and described). 